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Comparision of in situ spectroscopic ellipsometer and ex situ x-ray photoelectron spectroscopy depth profiling analysis of HfO2/Hf/Si multilayer structure

Cantas, Ayten; Ozyuzer, Lutfi; Aygun, Gulnur


BibTeX

@article{cantas_ayten_2018_34899,
  author       = {Cantas, Ayten and
                  Ozyuzer, Lutfi and
                  Aygun, Gulnur},
  title        = {{Comparision of in situ spectroscopic ellipsometer 
                   and ex situ x-ray photoelectron spectroscopy depth
                   profiling analysis of HfO2/Hf/Si multilayer
                   structure}},
  journal      = {MATERIALS RESEARCH EXPRESS},
  year         = 2018,
  volume       = 5,
  number       = 9,
  month        = jan,
}
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