1 Ocak 2020 Dergi makalesi Açık Erişim

Alevli, Mustafa; Gungor, Nese

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{
  "conceptrecid": "11018", 
  "created": "2021-03-15T07:34:25.037323+00:00", 
  "doi": "10.1116/6.0000494", 
  "files": [
    {
      "bucket": "39a01394-8be9-4688-b260-b37f1fe3effd", 
      "checksum": "md5:307eb621f8762ef7a90b67199bc47162", 
      "key": "bib-d84b9211-7e4c-41bf-bb30-61a35d7ce823.txt", 
      "links": {
        "self": "https://aperta.ulakbim.gov.tr/api/files/39a01394-8be9-4688-b260-b37f1fe3effd/bib-d84b9211-7e4c-41bf-bb30-61a35d7ce823.txt"
      }, 
      "size": 208, 
      "type": "txt"
    }
  ], 
  "id": 11019, 
  "links": {
    "badge": "https://aperta.ulakbim.gov.tr/badge/doi/10.1116/6.0000494.svg", 
    "bucket": "https://aperta.ulakbim.gov.tr/api/files/39a01394-8be9-4688-b260-b37f1fe3effd", 
    "doi": "https://doi.org/10.1116/6.0000494", 
    "html": "https://aperta.ulakbim.gov.tr/record/11019", 
    "latest": "https://aperta.ulakbim.gov.tr/api/records/11019", 
    "latest_html": "https://aperta.ulakbim.gov.tr/record/11019"
  }, 
  "metadata": {
    "access_right": "open", 
    "access_right_category": "success", 
    "communities": [
      {
        "id": "tubitak-destekli-proje-yayinlari"
      }
    ], 
    "creators": [
      {
        "affiliation": "Marmara Univ, Fac Arts & Sci, Dept Phys, TR-34722 Istanbul, Turkey", 
        "name": "Alevli, Mustafa"
      }, 
      {
        "affiliation": "Marmara Univ, Fac Arts & Sci, Dept Phys, TR-34722 Istanbul, Turkey", 
        "name": "Gungor, Nese"
      }
    ], 
    "description": "In this work, we have studied the influence of N-2/H-2 plasma gas flow rates on the hollow-cathode plasma-assisted atomic layer deposition (HCPA-ALD) growth of indium nitride (InN) films. The influence of N-2/H-2 plasma gas flow rates on crystallinity, lattice distortion, phonon properties, and bandgap was analyzed. We found that the strain can be relieved fully or partially through the incorporation of H-2 in plasma. We present Raman scattering measurements on HCPA-ALD grown InN films. We found that the E-2-high phonon relaxation time increases with decreasing H-2 plasma flow. Atomic force microscopy (AFM) topography measurements revealed high surface roughness for InN films deposited with N-2/H-2. The spectroscopic ellipsometry analysis revealed that InN surface layers are thick and contain large void structures with the incorporation of H-2 in N-2 plasma. Combining the AFM surface morphology analysis with spectroscopic ellipsometry analysis, we propose a possible surface reaction mechanism for hydrogen incorporation on an InN surface. A clear shift of the absorption edge and a decrease in the absorption coefficient were observed when H-2 was introduced into N-2 flow. These results may provide a useful guide for understanding the HCPA-ALD growth mechanism of InN and In-rich nitrides.", 
    "doi": "10.1116/6.0000494", 
    "has_grant": false, 
    "journal": {
      "issue": "6", 
      "title": "JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A", 
      "volume": "38"
    }, 
    "license": {
      "id": "cc-by"
    }, 
    "publication_date": "2020-01-01", 
    "relations": {
      "version": [
        {
          "count": 1, 
          "index": 0, 
          "is_last": true, 
          "last_child": {
            "pid_type": "recid", 
            "pid_value": "11019"
          }, 
          "parent": {
            "pid_type": "recid", 
            "pid_value": "11018"
          }
        }
      ]
    }, 
    "resource_type": {
      "subtype": "article", 
      "title": "Dergi makalesi", 
      "type": "publication"
    }, 
    "title": "Effect of N-2/H-2 plasma on the growth of InN thin films on sapphire by hollow-cathode plasma-assisted atomic layer deposition"
  }, 
  "owners": [
    1
  ], 
  "revision": 1, 
  "stats": {
    "downloads": 7.0, 
    "unique_downloads": 7.0, 
    "unique_views": 41.0, 
    "version_downloads": 7.0, 
    "version_unique_downloads": 7.0, 
    "version_unique_views": 41.0, 
    "version_views": 41.0, 
    "version_volume": 1456.0, 
    "views": 41.0, 
    "volume": 1456.0
  }, 
  "updated": "2021-03-15T07:34:25.098174+00:00"
}