1 Ocak 2020 Dergi makalesi Açık Erişim

Alevli, Mustafa; Gungor, Nese

BibTeX

@article{alevli_mustafa_2020_11019,
  author       = {Alevli, Mustafa and
                  Gungor, Nese},
  title        = {{Effect of N-2/H-2 plasma on the growth of InN thin 
                   films on sapphire by hollow-cathode plasma-
                   assisted atomic layer deposition}},
  journal      = {JOURNAL OF VACUUM SCIENCE \& TECHNOLOGY A},
  year         = 2020,
  volume       = 38,
  number       = 6,
  month        = jan,
}