1 Ocak 2021 Dergi makalesi Açık Erişim

Kutlu-Narin, Ece; Narin, Polat; Lisesivdin, Sefer Bora; Sarikavak-Lisesivdin, Beyza

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  <dc:creator>Kutlu-Narin, Ece</dc:creator>
  <dc:creator>Narin, Polat</dc:creator>
  <dc:creator>Lisesivdin, Sefer Bora</dc:creator>
  <dc:creator>Sarikavak-Lisesivdin, Beyza</dc:creator>
  <dc:date>2021-01-01</dc:date>
  <dc:description>This study focuses on the growth and physical properties of ZnO thin films on different substrates grown by mist-CVD enhanced with ozone (O-3) gas produced by corona discharge plasma using O-2. Here, O-3 is used to eliminate the defects related to oxygen in ZnO thin films. ZnO thin films are grown on amorphous soda-lime glass (SLG) and single crystals SiO2/Si (100) and c-plane Al2O3 substrates at 350 degrees C of low growth temperature. All ZnO thin films show dominant (0002) diffraction peaks from X-ray diffraction (XRD). As expected, full width at half maximum (FWHM) of (0002) is decreasing in ZnO thin films on single-crystal substrates, especially c-Al2O3 due to similar crystal structure. It is found that the strain in the films is lowest in ZnO/c-Al2O3. The surface morphologies of the thin films are studied with atomic force microscopy (AFM) and scanning electron microscopy (SEM) measurements. Grown ZnO films have a hexagonal and triangular nanostructure with different nanostructure sizes depending on the used substrate types. The calculated surface roughness is dramatically decreased in ZnO/c-Al2O3 compared to the other grown structures. The confocal Raman measurements show the E-2(H) peak of ZnO thin films at 437 cm(-1). It is suggested that O-3 gas produced by corona discharge plasma using O-2 can be useful to obtain better crystal quality and physical properties in ZnO thin films.</dc:description>
  <dc:identifier>https://aperta.ulakbim.gov.trrecord/238622</dc:identifier>
  <dc:identifier>oai:aperta.ulakbim.gov.tr:238622</dc:identifier>
  <dc:rights>info:eu-repo/semantics/openAccess</dc:rights>
  <dc:rights>http://www.opendefinition.org/licenses/cc-by</dc:rights>
  <dc:source>ADVANCES IN CONDENSED MATTER PHYSICS 2021</dc:source>
  <dc:title>Investigation of Structural and Optical Properties of ZnO Thin Films Grown on Different Substrates by Mist-CVD Enhanced with Ozone Gas Produced by Corona Discharge Plasma</dc:title>
  <dc:type>info:eu-repo/semantics/article</dc:type>
  <dc:type>publication-article</dc:type>
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