1 Ocak 2021 Dergi makalesi Açık Erişim

Kutlu-Narin, Ece; Narin, Polat; Lisesivdin, Sefer Bora; Sarikavak-Lisesivdin, Beyza

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  <identifier identifierType="URL">https://aperta.ulakbim.gov.tr/record/238622</identifier>
  <creators>
    <creator>
      <creatorName>Kutlu-Narin, Ece</creatorName>
      <givenName>Ece</givenName>
      <familyName>Kutlu-Narin</familyName>
      <affiliation>Ankara Univ, Fac Engn, Dept Phys Engn, TR-06100 Ankara, Turkey</affiliation>
    </creator>
    <creator>
      <creatorName>Narin, Polat</creatorName>
      <givenName>Polat</givenName>
      <familyName>Narin</familyName>
    </creator>
    <creator>
      <creatorName>Lisesivdin, Sefer Bora</creatorName>
      <givenName>Sefer Bora</givenName>
      <familyName>Lisesivdin</familyName>
      <affiliation>Gazi Univ, Fac Sci, Dept Phys, TR-06500 Ankara, Turkey</affiliation>
    </creator>
    <creator>
      <creatorName>Sarikavak-Lisesivdin, Beyza</creatorName>
      <givenName>Beyza</givenName>
      <familyName>Sarikavak-Lisesivdin</familyName>
      <affiliation>Gazi Univ, Fac Sci, Dept Phys, TR-06500 Ankara, Turkey</affiliation>
    </creator>
  </creators>
  <titles>
    <title>Investigation Of Structural And Optical Properties Of Zno Thin Films Grown On Different Substrates By Mist-Cvd Enhanced With Ozone Gas Produced By Corona Discharge Plasma</title>
  </titles>
  <publisher>Aperta</publisher>
  <publicationYear>2021</publicationYear>
  <dates>
    <date dateType="Issued">2021-01-01</date>
  </dates>
  <resourceType resourceTypeGeneral="Text">Journal article</resourceType>
  <alternateIdentifiers>
    <alternateIdentifier alternateIdentifierType="url">https://aperta.ulakbim.gov.tr/record/238622</alternateIdentifier>
  </alternateIdentifiers>
  <relatedIdentifiers>
    <relatedIdentifier relatedIdentifierType="DOI" relationType="IsIdenticalTo">10.1155/2021/1130829</relatedIdentifier>
  </relatedIdentifiers>
  <rightsList>
    <rights rightsURI="http://www.opendefinition.org/licenses/cc-by">Creative Commons Attribution</rights>
    <rights rightsURI="info:eu-repo/semantics/openAccess">Open Access</rights>
  </rightsList>
  <descriptions>
    <description descriptionType="Abstract">This study focuses on the growth and physical properties of ZnO thin films on different substrates grown by mist-CVD enhanced with ozone (O-3) gas produced by corona discharge plasma using O-2. Here, O-3 is used to eliminate the defects related to oxygen in ZnO thin films. ZnO thin films are grown on amorphous soda-lime glass (SLG) and single crystals SiO2/Si (100) and c-plane Al2O3 substrates at 350 degrees C of low growth temperature. All ZnO thin films show dominant (0002) diffraction peaks from X-ray diffraction (XRD). As expected, full width at half maximum (FWHM) of (0002) is decreasing in ZnO thin films on single-crystal substrates, especially c-Al2O3 due to similar crystal structure. It is found that the strain in the films is lowest in ZnO/c-Al2O3. The surface morphologies of the thin films are studied with atomic force microscopy (AFM) and scanning electron microscopy (SEM) measurements. Grown ZnO films have a hexagonal and triangular nanostructure with different nanostructure sizes depending on the used substrate types. The calculated surface roughness is dramatically decreased in ZnO/c-Al2O3 compared to the other grown structures. The confocal Raman measurements show the E-2(H) peak of ZnO thin films at 437 cm(-1). It is suggested that O-3 gas produced by corona discharge plasma using O-2 can be useful to obtain better crystal quality and physical properties in ZnO thin films.</description>
  </descriptions>
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