1 Ocak 2021 Dergi makalesi Açık Erişim

Kutlu-Narin, Ece; Narin, Polat; Lisesivdin, Sefer Bora; Sarikavak-Lisesivdin, Beyza

Citation Style Language JSON

{
  "DOI": "10.1155/2021/1130829", 
  "abstract": "This study focuses on the growth and physical properties of ZnO thin films on different substrates grown by mist-CVD enhanced with ozone (O-3) gas produced by corona discharge plasma using O-2. Here, O-3 is used to eliminate the defects related to oxygen in ZnO thin films. ZnO thin films are grown on amorphous soda-lime glass (SLG) and single crystals SiO2/Si (100) and c-plane Al2O3 substrates at 350 degrees C of low growth temperature. All ZnO thin films show dominant (0002) diffraction peaks from X-ray diffraction (XRD). As expected, full width at half maximum (FWHM) of (0002) is decreasing in ZnO thin films on single-crystal substrates, especially c-Al2O3 due to similar crystal structure. It is found that the strain in the films is lowest in ZnO/c-Al2O3. The surface morphologies of the thin films are studied with atomic force microscopy (AFM) and scanning electron microscopy (SEM) measurements. Grown ZnO films have a hexagonal and triangular nanostructure with different nanostructure sizes depending on the used substrate types. The calculated surface roughness is dramatically decreased in ZnO/c-Al2O3 compared to the other grown structures. The confocal Raman measurements show the E-2(H) peak of ZnO thin films at 437 cm(-1). It is suggested that O-3 gas produced by corona discharge plasma using O-2 can be useful to obtain better crystal quality and physical properties in ZnO thin films.", 
  "author": [
    {
      "family": "Kutlu-Narin", 
      "given": " Ece"
    }, 
    {
      "family": "Narin", 
      "given": " Polat"
    }, 
    {
      "family": "Lisesivdin", 
      "given": " Sefer Bora"
    }, 
    {
      "family": "Sarikavak-Lisesivdin", 
      "given": " Beyza"
    }
  ], 
  "container_title": "ADVANCES IN CONDENSED MATTER PHYSICS", 
  "id": "238622", 
  "issued": {
    "date-parts": [
      [
        2021, 
        1, 
        1
      ]
    ]
  }, 
  "title": "Investigation of Structural and Optical Properties of ZnO Thin Films Grown on Different Substrates by Mist-CVD Enhanced with Ozone Gas Produced by Corona Discharge Plasma", 
  "type": "article-journal", 
  "volume": "2021"
}