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Process optimization of parameterized single shot method for a rapid production of photon sireve with direct write lithography (vol 209, pg 41, 2019)y

Ruzgar, Kemal; Bacioglu, Akin


BibTeX

@article{ruzgar_kemal_2019_99759,
  author       = {Ruzgar, Kemal and
                  Bacioglu, Akin},
  title        = {{Process optimization of parameterized single shot 
                   method for a rapid production of photon sireve
                   with direct write lithography (vol 209, pg 41,
                   2019)y}},
  journal      = {MICROELECTRONIC ENGINEERING},
  year         = 2019,
  volume       = 215,
  month        = jan,
}
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