Dergi makalesi Açık Erişim
Ruzgar, Kemal; Bacioglu, Akin
@article{ruzgar_kemal_2019_99759,
author = {Ruzgar, Kemal and
Bacioglu, Akin},
title = {{Process optimization of parameterized single shot
method for a rapid production of photon sireve
with direct write lithography (vol 209, pg 41,
2019)y}},
journal = {MICROELECTRONIC ENGINEERING},
year = 2019,
volume = 215,
month = jan,
}
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