1 Ocak 2019 Dergi makalesi Açık Erişim

Ruzgar, Kemal; Bacioglu, Akin

Citation Style Language JSON

{
  "DOI": "10.1016/j.mee.2019.110995", 
  "abstract": "\u00d6z bulunamad\u0131.", 
  "author": [
    {
      "family": "Ruzgar", 
      "given": " Kemal"
    }, 
    {
      "family": "Bacioglu", 
      "given": " Akin"
    }
  ], 
  "container_title": "MICROELECTRONIC ENGINEERING", 
  "id": "99759", 
  "issued": {
    "date-parts": [
      [
        2019, 
        1, 
        1
      ]
    ]
  }, 
  "title": "Process optimization of parameterized single shot method for a rapid production of photon sireve with direct write lithography (vol 209, pg 41, 2019)y", 
  "type": "article-journal", 
  "volume": "215"
}