Dergi makalesi Açık Erişim
Ruzgar, Kemal; Bacioglu, Akin
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<identifier identifierType="URL">https://aperta.ulakbim.gov.tr/record/99759</identifier>
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<creator>
<creatorName>Ruzgar, Kemal</creatorName>
<givenName>Kemal</givenName>
<familyName>Ruzgar</familyName>
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<creator>
<creatorName>Bacioglu, Akin</creatorName>
<givenName>Akin</givenName>
<familyName>Bacioglu</familyName>
<affiliation>Hacettepe Univ, Dept Phys Engn, TR-06800 Ankara, Turkey</affiliation>
</creator>
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<titles>
<title>Process Optimization Of Parameterized Single Shot Method For A Rapid Production Of Photon Sireve With Direct Write Lithography (Vol 209, Pg 41, 2019)Y</title>
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<publisher>Aperta</publisher>
<publicationYear>2019</publicationYear>
<dates>
<date dateType="Issued">2019-01-01</date>
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<resourceType resourceTypeGeneral="Text">Journal article</resourceType>
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<relatedIdentifier relatedIdentifierType="DOI" relationType="IsIdenticalTo">10.1016/j.mee.2019.110995</relatedIdentifier>
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<rightsList>
<rights rightsURI="http://www.opendefinition.org/licenses/cc-by">Creative Commons Attribution</rights>
<rights rightsURI="info:eu-repo/semantics/openAccess">Open Access</rights>
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<descriptions>
<description descriptionType="Abstract">Öz bulunamadı.</description>
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