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Investigation of a Hybrid Approach for Normally-Off GaN HEMTs Using Fluorine Treatment and Recess Etch Techniques

Kurt, Gokhan; Gulseren, Melisa Ekin; Salkim, Gurur; Ural, Sertac; Kayal, Omer Ahmet; Ozturk, Mustafa; Butun, Bayram; Kabak, Mehmet; Ozbay, Ekmel


BibTeX

@article{kurt_gokhan_2019_72091,
  author       = {Kurt, Gokhan and
                  Gulseren, Melisa Ekin and
                  Salkim, Gurur and
                  Ural, Sertac and
                  Kayal, Omer Ahmet and
                  Ozturk, Mustafa and
                  Butun, Bayram and
                  Kabak, Mehmet and
                  Ozbay, Ekmel},
  title        = {{Investigation of a Hybrid Approach for Normally- 
                   Off GaN HEMTs Using Fluorine Treatment and Recess
                   Etch Techniques}},
  journal      = {IEEE JOURNAL OF THE ELECTRON DEVICES SOCIETY},
  year         = 2019,
  volume       = 7,
  number       = 1,
  pages        = {351-357},
  month        = jan,
}
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