Dergi makalesi Açık Erişim
Kurt, Gokhan; Gulseren, Melisa Ekin; Ghobadi, Turkan Gamze Ulusoy; Ural, Sertac; Kayal, Omer Ahmet; Ozturk, Mustafa; Butun, Bayram; Kabak, Mehmet; Ozbay, Ekmel
<?xml version='1.0' encoding='UTF-8'?> <record xmlns="http://www.loc.gov/MARC21/slim"> <leader>00000nam##2200000uu#4500</leader> <datafield tag="245" ind1=" " ind2=" "> <subfield code="a">Normally-off AlGaN/GaN MIS-HEMT with low gate leakage current using a hydrofluoric acid pre-treatment</subfield> </datafield> <datafield tag="909" ind1="C" ind2="4"> <subfield code="p">SOLID-STATE ELECTRONICS</subfield> <subfield code="v">158</subfield> <subfield code="c">22-27</subfield> </datafield> <controlfield tag="001">70709</controlfield> <datafield tag="980" ind1=" " ind2=" "> <subfield code="a">user-tubitak-destekli-proje-yayinlari</subfield> </datafield> <datafield tag="520" ind1=" " ind2=" "> <subfield code="a">We demonstrate the electrical performances of an AlGaN/GaN metal-insulator-semiconductor high electron mobility transistor (MIS-HEMT) with low gate leakage current (I-g). A low gate leakage current as low as the order of 10(-11) A/mm was achieved from normally-off MIS-HEMT device (V-th = 2.16 V) with a partially recessed gate, fluorine treatment, and ALD Al2O3 gate dielectric layer. The gate leakage current decrease is attributed to the pre-treatment of the gate region with hydrofluoric acid (HF) and deionized water (DI) solution, which acts to remove the native oxide layer and thus decrease interface traps. X-ray photoelectron spectroscopy (XPS) and atomic force microscopy (AFM) analyses demonstrate that the AlGaN surfaces are modified such that the surface roughness and native oxide introduced by the treatments used to achieve normally-off operation are remedied with the use of the pre-treatment.</subfield> </datafield> <datafield tag="650" ind1="1" ind2="7"> <subfield code="2">opendefinition.org</subfield> <subfield code="a">cc-by</subfield> </datafield> <datafield tag="700" ind1=" " ind2=" "> <subfield code="a">Gulseren, Melisa Ekin</subfield> </datafield> <datafield tag="700" ind1=" " ind2=" "> <subfield code="a">Ghobadi, Turkan Gamze Ulusoy</subfield> </datafield> <datafield tag="700" ind1=" " ind2=" "> <subfield code="u">Bilkent Univ, Nanotechnol Res Ctr, TR-06800 Ankara, Turkey</subfield> <subfield code="a">Ural, Sertac</subfield> </datafield> <datafield tag="700" ind1=" " ind2=" "> <subfield code="u">Bilkent Univ, Nanotechnol Res Ctr, TR-06800 Ankara, Turkey</subfield> <subfield code="a">Kayal, Omer Ahmet</subfield> </datafield> <datafield tag="700" ind1=" " ind2=" "> <subfield code="u">Bilkent Univ, Nanotechnol Res Ctr, TR-06800 Ankara, Turkey</subfield> <subfield code="a">Ozturk, Mustafa</subfield> </datafield> <datafield tag="700" ind1=" " ind2=" "> <subfield code="u">Bilkent Univ, Nanotechnol Res Ctr, TR-06800 Ankara, Turkey</subfield> <subfield code="a">Butun, Bayram</subfield> </datafield> <datafield tag="700" ind1=" " ind2=" "> <subfield code="u">Ankara Univ, Dept Engn Phys, Fac Engn, TR-06100 Ankara, Turkey</subfield> <subfield code="a">Kabak, Mehmet</subfield> </datafield> <datafield tag="700" ind1=" " ind2=" "> <subfield code="a">Ozbay, Ekmel</subfield> </datafield> <datafield tag="980" ind1=" " ind2=" "> <subfield code="b">article</subfield> <subfield code="a">publication</subfield> </datafield> <datafield tag="542" ind1=" " ind2=" "> <subfield code="l">open</subfield> </datafield> <datafield tag="100" ind1=" " ind2=" "> <subfield code="a">Kurt, Gokhan</subfield> </datafield> <datafield tag="260" ind1=" " ind2=" "> <subfield code="c">2019-01-01</subfield> </datafield> <controlfield tag="005">20210316031913.0</controlfield> <datafield tag="909" ind1="C" ind2="O"> <subfield code="o">oai:zenodo.org:70709</subfield> <subfield code="p">user-tubitak-destekli-proje-yayinlari</subfield> </datafield> <datafield tag="856" ind1="4" ind2=" "> <subfield code="z">md5:650b3b076bcb4d3574b09e84986ff43b</subfield> <subfield code="s">256</subfield> <subfield code="u">https://aperta.ulakbim.gov.trrecord/70709/files/bib-093915fc-f79e-4bf7-8fcd-61f9ba9fc85e.txt</subfield> </datafield> <datafield tag="540" ind1=" " ind2=" "> <subfield code="u">http://www.opendefinition.org/licenses/cc-by</subfield> <subfield code="a">Creative Commons Attribution</subfield> </datafield> <datafield tag="024" ind1=" " ind2=" "> <subfield code="a">10.1016/j.sse.2019.05.008</subfield> <subfield code="2">doi</subfield> </datafield> </record>
Görüntülenme | 21 |
İndirme | 5 |
Veri hacmi | 1.3 kB |
Tekil görüntülenme | 19 |
Tekil indirme | 5 |