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Oyman, Hilmi Artun; Gokdel, Yigit Daghan; Ferhanoglu, Onur; Yalcinkaya, Arda Deniz
<?xml version='1.0' encoding='utf-8'?> <oai_dc:dc xmlns:dc="http://purl.org/dc/elements/1.1/" xmlns:oai_dc="http://www.openarchives.org/OAI/2.0/oai_dc/" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xsi:schemaLocation="http://www.openarchives.org/OAI/2.0/oai_dc/ http://www.openarchives.org/OAI/2.0/oai_dc.xsd"> <dc:creator>Oyman, Hilmi Artun</dc:creator> <dc:creator>Gokdel, Yigit Daghan</dc:creator> <dc:creator>Ferhanoglu, Onur</dc:creator> <dc:creator>Yalcinkaya, Arda Deniz</dc:creator> <dc:date>2018-01-01</dc:date> <dc:description>A magnetically actuated microscanner is used in a laser scanning microscopy application. Stress distribution along the circular-profiled flexure is compared with a rectangular counterpart in finite-element environment. Magnetic actuation mechanism of the scanning unit is explained in detail. Moreover, reliability of the scanner is tested for 3 x 10(6) cycle. The scanning device is designed to meet a confocal microscopy application providing 100 mu m x 100 mu m field of view and <3 mu m lateral resolution. The resonance frequencies of the device were analytically modeled, where we obtained 130- and 268-Hz resonance values for the out-of-plane and torsion modes, respectively. The scanning device provided an optical scan angle about 2.5 deg for 170-mA drive current, enabling the desired field of view for our custom built confocal microscope setup. Finally, imaging experiments were conducted on a resolution target, showcasing the desired scan area and resolution. (C) 2018 Society of Photo-Optical Instrumentation Engineers (SPIE)</dc:description> <dc:identifier>https://aperta.ulakbim.gov.trrecord/33181</dc:identifier> <dc:identifier>oai:zenodo.org:33181</dc:identifier> <dc:rights>info:eu-repo/semantics/openAccess</dc:rights> <dc:rights>http://www.opendefinition.org/licenses/cc-by</dc:rights> <dc:source>OPTICAL ENGINEERING 57(4)</dc:source> <dc:title>Performance of a three-dimensional-printed microscanner in a laser scanning microscopy application</dc:title> <dc:type>info:eu-repo/semantics/article</dc:type> <dc:type>publication-article</dc:type> </oai_dc:dc>
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