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Performance of a three-dimensional-printed microscanner in a laser scanning microscopy application

Oyman, Hilmi Artun; Gokdel, Yigit Daghan; Ferhanoglu, Onur; Yalcinkaya, Arda Deniz


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{
  "DOI": "10.1117/1.OE.57.4.041405", 
  "abstract": "A magnetically actuated microscanner is used in a laser scanning microscopy application. Stress distribution along the circular-profiled flexure is compared with a rectangular counterpart in finite-element environment. Magnetic actuation mechanism of the scanning unit is explained in detail. Moreover, reliability of the scanner is tested for 3 x 10(6) cycle. The scanning device is designed to meet a confocal microscopy application providing 100 mu m x 100 mu m field of view and <3 mu m lateral resolution. The resonance frequencies of the device were analytically modeled, where we obtained 130- and 268-Hz resonance values for the out-of-plane and torsion modes, respectively. The scanning device provided an optical scan angle about 2.5 deg for 170-mA drive current, enabling the desired field of view for our custom built confocal microscope setup. Finally, imaging experiments were conducted on a resolution target, showcasing the desired scan area and resolution. (C) 2018 Society of Photo-Optical Instrumentation Engineers (SPIE)", 
  "author": [
    {
      "family": "Oyman", 
      "given": " Hilmi Artun"
    }, 
    {
      "family": "Gokdel", 
      "given": " Yigit Daghan"
    }, 
    {
      "family": "Ferhanoglu", 
      "given": " Onur"
    }, 
    {
      "family": "Yalcinkaya", 
      "given": " Arda Deniz"
    }
  ], 
  "container_title": "OPTICAL ENGINEERING", 
  "id": "33181", 
  "issue": "4", 
  "issued": {
    "date-parts": [
      [
        2018, 
        1, 
        1
      ]
    ]
  }, 
  "title": "Performance of a three-dimensional-printed microscanner in a laser scanning microscopy application", 
  "type": "article-journal", 
  "volume": "57"
}
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