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Oyman, Hilmi Artun; Gokdel, Yigit Daghan; Ferhanoglu, Onur; Yalcinkaya, Arda Deniz
{ "DOI": "10.1117/1.OE.57.4.041405", "abstract": "A magnetically actuated microscanner is used in a laser scanning microscopy application. Stress distribution along the circular-profiled flexure is compared with a rectangular counterpart in finite-element environment. Magnetic actuation mechanism of the scanning unit is explained in detail. Moreover, reliability of the scanner is tested for 3 x 10(6) cycle. The scanning device is designed to meet a confocal microscopy application providing 100 mu m x 100 mu m field of view and <3 mu m lateral resolution. The resonance frequencies of the device were analytically modeled, where we obtained 130- and 268-Hz resonance values for the out-of-plane and torsion modes, respectively. The scanning device provided an optical scan angle about 2.5 deg for 170-mA drive current, enabling the desired field of view for our custom built confocal microscope setup. Finally, imaging experiments were conducted on a resolution target, showcasing the desired scan area and resolution. (C) 2018 Society of Photo-Optical Instrumentation Engineers (SPIE)", "author": [ { "family": "Oyman", "given": " Hilmi Artun" }, { "family": "Gokdel", "given": " Yigit Daghan" }, { "family": "Ferhanoglu", "given": " Onur" }, { "family": "Yalcinkaya", "given": " Arda Deniz" } ], "container_title": "OPTICAL ENGINEERING", "id": "33181", "issue": "4", "issued": { "date-parts": [ [ 2018, 1, 1 ] ] }, "title": "Performance of a three-dimensional-printed microscanner in a laser scanning microscopy application", "type": "article-journal", "volume": "57" }
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