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Grubert, Bernd; Kreitschik, David; Schnabel, Olaf; Siewert, Frank; Geckeler, Ralf. D.; Schumann, Matthias; Just, Andreas; Krause, Michael; Yandayan, Tanfer; Akgoz, S. Asli
<?xml version='1.0' encoding='UTF-8'?> <record xmlns="http://www.loc.gov/MARC21/slim"> <leader>00000nam##2200000uu#4500</leader> <datafield tag="245" ind1=" " ind2=" "> <subfield code="a">A precise aperture centring device (ACenD) for autocollimator-based surface measuring profilers</subfield> </datafield> <datafield tag="024" ind1=" " ind2=" "> <subfield code="a">10.1117/12.2531613</subfield> <subfield code="2">doi</subfield> </datafield> <controlfield tag="001">99955</controlfield> <datafield tag="980" ind1=" " ind2=" "> <subfield code="a">user-tubitak-adresli-yayinlar</subfield> </datafield> <datafield tag="520" ind1=" " ind2=" "> <subfield code="a">A new Aperture Centring Device (ACenD) for precisely positioning small apertures with respect to the autocollimator's optics has been developed. With the new device, differences in the angle response of autocollimators between the calibration at a laboratory and their subsequent application in the slope measuring profilers are significantly minimized. Evaluation of the device with a circular aperture size of d=2.5 mm was carried out in different laboratories. It was verified that the ACenD is capable of achieving a reproducible aperture alignment &lt; 0.1 mm. The device is a substantial aid for the operation of slope measuring profilometers and enables the measurable, documentable, and transferable positioning of apertures that did not exist before.</subfield> </datafield> <datafield tag="650" ind1="1" ind2="7"> <subfield code="2">opendefinition.org</subfield> <subfield code="a">cc-by</subfield> </datafield> <datafield tag="700" ind1=" " ind2=" "> <subfield code="u">MOELLER WEDEL OPTICAL GmbH, Rosengarten 10, D-22880 Wedel, Germany</subfield> <subfield code="a">Kreitschik, David</subfield> </datafield> <datafield tag="700" ind1=" " ind2=" "> <subfield code="u">Schnabel Elekt Messtechn, Rosengarten 10, D-22880 Wedel, Germany</subfield> <subfield code="a">Schnabel, Olaf</subfield> </datafield> <datafield tag="700" ind1=" " ind2=" "> <subfield code="u">Helmholtz Zentrum Berlin, Dept Opt & Beamlines, Albert Einstein Str 15, D-12489 Berlin, Germany</subfield> <subfield code="a">Siewert, Frank</subfield> </datafield> <datafield tag="700" ind1=" " ind2=" "> <subfield code="u">Physikalisch Tech Bundesanstalt, Bundesallee 100, D-38116 Braunschweig, Germany</subfield> <subfield code="a">Geckeler, Ralf. D.</subfield> </datafield> <datafield tag="700" ind1=" " ind2=" "> <subfield code="u">Physikalisch Tech Bundesanstalt, Bundesallee 100, D-38116 Braunschweig, Germany</subfield> <subfield code="a">Schumann, Matthias</subfield> </datafield> <datafield tag="700" ind1=" " ind2=" "> <subfield code="u">Physikalisch Tech Bundesanstalt, Bundesallee 100, D-38116 Braunschweig, Germany</subfield> <subfield code="a">Just, Andreas</subfield> </datafield> <datafield tag="700" ind1=" " ind2=" "> <subfield code="u">Physikalisch Tech Bundesanstalt, Bundesallee 100, D-38116 Braunschweig, Germany</subfield> <subfield code="a">Krause, Michael</subfield> </datafield> <datafield tag="700" ind1=" " ind2=" "> <subfield code="u">TUBITAK Ulusal Metroloji Enstitusu, Dr Zeki Acar Cad 1, TR-41470 Gebze, Turkey</subfield> <subfield code="a">Yandayan, Tanfer</subfield> </datafield> <datafield tag="700" ind1=" " ind2=" "> <subfield code="u">TUBITAK Ulusal Metroloji Enstitusu, Dr Zeki Acar Cad 1, TR-41470 Gebze, Turkey</subfield> <subfield code="a">Akgoz, S. Asli</subfield> </datafield> <datafield tag="980" ind1=" " ind2=" "> <subfield code="b">conferencepaper</subfield> <subfield code="a">publication</subfield> </datafield> <datafield tag="542" ind1=" " ind2=" "> <subfield code="l">open</subfield> </datafield> <datafield tag="100" ind1=" " ind2=" "> <subfield code="u">MOELLER WEDEL OPTICAL GmbH, Rosengarten 10, D-22880 Wedel, Germany</subfield> <subfield code="a">Grubert, Bernd</subfield> </datafield> <datafield tag="711" ind1=" " ind2=" "> <subfield code="a">ADVANCES IN METROLOGY FOR X-RAY AND EUV OPTICS VIII</subfield> </datafield> <datafield tag="260" ind1=" " ind2=" "> <subfield code="c">2019-01-01</subfield> </datafield> <controlfield tag="005">20210316141943.0</controlfield> <datafield tag="909" ind1="C" ind2="O"> <subfield code="o">oai:zenodo.org:99955</subfield> <subfield code="p">user-tubitak-adresli-yayinlar</subfield> </datafield> <datafield tag="856" ind1="4" ind2=" "> <subfield code="z">md5:7d190139435186d23b68550bfb58f889</subfield> <subfield code="s">287</subfield> <subfield code="u">https://aperta.ulakbim.gov.trrecord/99955/files/bib-40e8ef38-7277-4e37-ade1-af2b1a8a05cb.txt</subfield> </datafield> <datafield tag="540" ind1=" " ind2=" "> <subfield code="u">http://www.opendefinition.org/licenses/cc-by</subfield> <subfield code="a">Creative Commons Attribution</subfield> </datafield> </record>
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