1 Ocak 2019 Konferans bildirisi Açık Erişim

Grubert, Bernd; Kreitschik, David; Schnabel, Olaf; Siewert, Frank; Geckeler, Ralf. D.; Schumann, Matthias; Just, Andreas; Krause, Michael; Yandayan, Tanfer; Akgoz, S. Asli

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        "affiliation": "MOELLER WEDEL OPTICAL GmbH, Rosengarten 10, D-22880 Wedel, Germany", 
        "name": "Grubert, Bernd"
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      {
        "affiliation": "MOELLER WEDEL OPTICAL GmbH, Rosengarten 10, D-22880 Wedel, Germany", 
        "name": "Kreitschik, David"
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      {
        "affiliation": "Schnabel Elekt Messtechn, Rosengarten 10, D-22880 Wedel, Germany", 
        "name": "Schnabel, Olaf"
      }, 
      {
        "affiliation": "Helmholtz Zentrum Berlin, Dept Opt & Beamlines, Albert Einstein Str 15, D-12489 Berlin, Germany", 
        "name": "Siewert, Frank"
      }, 
      {
        "affiliation": "Physikalisch Tech Bundesanstalt, Bundesallee 100, D-38116 Braunschweig, Germany", 
        "name": "Geckeler, Ralf. D."
      }, 
      {
        "affiliation": "Physikalisch Tech Bundesanstalt, Bundesallee 100, D-38116 Braunschweig, Germany", 
        "name": "Schumann, Matthias"
      }, 
      {
        "affiliation": "Physikalisch Tech Bundesanstalt, Bundesallee 100, D-38116 Braunschweig, Germany", 
        "name": "Just, Andreas"
      }, 
      {
        "affiliation": "Physikalisch Tech Bundesanstalt, Bundesallee 100, D-38116 Braunschweig, Germany", 
        "name": "Krause, Michael"
      }, 
      {
        "affiliation": "TUBITAK Ulusal Metroloji Enstitusu, Dr Zeki Acar Cad 1, TR-41470 Gebze, Turkey", 
        "name": "Yandayan, Tanfer"
      }, 
      {
        "affiliation": "TUBITAK Ulusal Metroloji Enstitusu, Dr Zeki Acar Cad 1, TR-41470 Gebze, Turkey", 
        "name": "Akgoz, S. Asli"
      }
    ], 
    "description": "A new Aperture Centring Device (ACenD) for precisely positioning small apertures with respect to the autocollimator's optics has been developed. With the new device, differences in the angle response of autocollimators between the calibration at a laboratory and their subsequent application in the slope measuring profilers are significantly minimized. Evaluation of the device with a circular aperture size of d=2.5 mm was carried out in different laboratories. It was verified that the ACenD is capable of achieving a reproducible aperture alignment < 0.1 mm. The device is a substantial aid for the operation of slope measuring profilometers and enables the measurable, documentable, and transferable positioning of apertures that did not exist before.", 
    "doi": "10.1117/12.2531613", 
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    "meeting": {
      "title": "ADVANCES IN METROLOGY FOR X-RAY AND EUV OPTICS VIII"
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      "title": "Konferans bildirisi", 
      "type": "publication"
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    "title": "A precise aperture centring device (ACenD) for autocollimator-based surface measuring profilers"
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