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Silicon photodetectors integrated with vertical silicon nitride waveguides as image sensor pixels: Fabrication and characterization

Tut, Turgut; Dan, Yaping; Duane, Peter; Ye, Winnie N.; Degirmenci, Fatih; Yu, Young; Wober, Munib; Crozier, Kenneth B.


BibTeX

@article{tut_turgut_2014_99685,
  author       = {Tut, Turgut and
                  Dan, Yaping and
                  Duane, Peter and
                  Ye, Winnie N. and
                  Degirmenci, Fatih and
                  Yu, Young and
                  Wober, Munib and
                  Crozier, Kenneth B.},
  title        = {{Silicon photodetectors integrated with vertical 
                   silicon nitride waveguides as image sensor pixels:
                   Fabrication and characterization}},
  journal      = {JOURNAL OF VACUUM SCIENCE \& TECHNOLOGY B},
  year         = 2014,
  volume       = 32,
  number       = 3,
  month        = jan,
}
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