Dergi makalesi Açık Erişim
Yandayan, Tanfer; Geckeler, Ralf D.; Just, Andreas; Krause, Michael; Akgoz, S. Asli; Aksulu, Murat; Grubert, Bernd; Watanabe, Tsukasa
<?xml version='1.0' encoding='UTF-8'?> <record xmlns="http://www.loc.gov/MARC21/slim"> <leader>00000nam##2200000uu#4500</leader> <datafield tag="245" ind1=" " ind2=" "> <subfield code="a">Investigations of interpolation errors of angle encoders for high precision angle metrology</subfield> </datafield> <datafield tag="909" ind1="C" ind2="4"> <subfield code="p">MEASUREMENT SCIENCE AND TECHNOLOGY</subfield> <subfield code="v">29</subfield> <subfield code="n">6</subfield> </datafield> <controlfield tag="001">93287</controlfield> <datafield tag="980" ind1=" " ind2=" "> <subfield code="a">user-tubitak-adresli-yayinlar</subfield> </datafield> <datafield tag="520" ind1=" " ind2=" "> <subfield code="a">Interpolation errors at small angular scales are caused by the subdivision of the angular interval between adjacent grating lines into smaller intervals when radial gratings are used in angle encoders. They are often a major error source in precision angle metrology and better approaches for determining them at low levels of uncertainty are needed. Extensive investigations of interpolation errors of different angle encoders with various interpolators and interpolation schemes were carried out by adapting the shearing method to the calibration of autocollimators with angle encoders. The results of the laboratories with advanced angle metrology capabilities are presented which were acquired by the use of four different high precision angle encoders/interpolators/rotary tables. State of the art uncertainties down to 1 milliarcsec (5 nrad) were achieved for the determination of the interpolation errors using the shearing method which provides simultaneous access to the angle deviations of the autocollimator and of the angle encoder. Compared to the calibration and measurement capabilities (CMC) of the participants for autocollimators, the use of the shearing technique represents a substantial improvement in the uncertainty by a factor of up to 5 in addition to the precise determination of interpolation errors or their residuals (when compensated). A discussion of the results is carried out in conjunction with the equipment used.</subfield> </datafield> <datafield tag="650" ind1="1" ind2="7"> <subfield code="2">opendefinition.org</subfield> <subfield code="a">cc-by</subfield> </datafield> <datafield tag="700" ind1=" " ind2=" "> <subfield code="u">Phys Tech Bundesanstalt, Bundesallee 100, D-38116 Braunschweig, Germany</subfield> <subfield code="a">Geckeler, Ralf D.</subfield> </datafield> <datafield tag="700" ind1=" " ind2=" "> <subfield code="u">Phys Tech Bundesanstalt, Bundesallee 100, D-38116 Braunschweig, Germany</subfield> <subfield code="a">Just, Andreas</subfield> </datafield> <datafield tag="700" ind1=" " ind2=" "> <subfield code="u">Phys Tech Bundesanstalt, Bundesallee 100, D-38116 Braunschweig, Germany</subfield> <subfield code="a">Krause, Michael</subfield> </datafield> <datafield tag="700" ind1=" " ind2=" "> <subfield code="u">TUBITAK UME, Baris Mah Dr Zeki Acar Cad Pk54, TR-41470 Gebze, Turkey</subfield> <subfield code="a">Akgoz, S. Asli</subfield> </datafield> <datafield tag="700" ind1=" " ind2=" "> <subfield code="u">TUBITAK UME, Baris Mah Dr Zeki Acar Cad Pk54, TR-41470 Gebze, Turkey</subfield> <subfield code="a">Aksulu, Murat</subfield> </datafield> <datafield tag="700" ind1=" " ind2=" "> <subfield code="u">MOLLER WEDEL OPT GmbH, Rosengarten 10, D-22880 Wedel, Germany</subfield> <subfield code="a">Grubert, Bernd</subfield> </datafield> <datafield tag="700" ind1=" " ind2=" "> <subfield code="u">AIST, NMIJ, Tsukuba Cent 3,1-1-1 Umezono, Tsukuba, Ibaraki 3058563, Japan</subfield> <subfield code="a">Watanabe, Tsukasa</subfield> </datafield> <datafield tag="980" ind1=" " ind2=" "> <subfield code="b">article</subfield> <subfield code="a">publication</subfield> </datafield> <datafield tag="542" ind1=" " ind2=" "> <subfield code="l">open</subfield> </datafield> <datafield tag="100" ind1=" " ind2=" "> <subfield code="u">TUBITAK UME, Baris Mah Dr Zeki Acar Cad Pk54, TR-41470 Gebze, Turkey</subfield> <subfield code="a">Yandayan, Tanfer</subfield> </datafield> <datafield tag="260" ind1=" " ind2=" "> <subfield code="c">2018-01-01</subfield> </datafield> <controlfield tag="005">20210316124640.0</controlfield> <datafield tag="909" ind1="C" ind2="O"> <subfield code="o">oai:zenodo.org:93287</subfield> <subfield code="p">user-tubitak-adresli-yayinlar</subfield> </datafield> <datafield tag="856" ind1="4" ind2=" "> <subfield code="z">md5:47a81763ff1b71047321cce7f9bc90eb</subfield> <subfield code="s">243</subfield> <subfield code="u">https://aperta.ulakbim.gov.trrecord/93287/files/bib-87e6fd84-cb01-4a09-841b-654c765934a3.txt</subfield> </datafield> <datafield tag="540" ind1=" " ind2=" "> <subfield code="u">http://www.opendefinition.org/licenses/cc-by</subfield> <subfield code="a">Creative Commons Attribution</subfield> </datafield> <datafield tag="024" ind1=" " ind2=" "> <subfield code="a">10.1088/1361-6501/aabef6</subfield> <subfield code="2">doi</subfield> </datafield> </record>
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