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Optical sensor for hydrogen gas based on a palladium-coated polymer microresonator

Eryurek, Mustafa; Karadag, Yasin; Tasaltin, Nevin; Kilinc, Necmettin; Kiraz, Alper


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        "affiliation": "Koc Univ, Dept Phys, TR-34450 Istanbul, Turkey", 
        "name": "Eryurek, Mustafa"
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      {
        "affiliation": "Marmara Univ, Dept Phys, TR-34722 Istanbul, Turkey", 
        "name": "Karadag, Yasin"
      }, 
      {
        "affiliation": "TUBITAK MRC Mat Inst, Sensor Mat Photon Technol Lab, TR-41470 Gebze, Kocaeli, Turkey", 
        "name": "Tasaltin, Nevin"
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      {
        "affiliation": "Nigde Univ, Mechatron Engn Dept, TR-51245 Nigde, Turkey", 
        "name": "Kilinc, Necmettin"
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      {
        "name": "Kiraz, Alper"
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    "description": "We report an integrated optical sensor of hydrogen (H-2) gas employing an SU-8 polymer microdisk resonator coated with a palladium (Pd) layer and coupled to a single-mode optical waveguide. The sensing mechanism relies on the expansion in the Pd lattice due to palladium hydride formation in the presence of H-2. Strain induced in the microresonator then causes a red shift of the spectral positions of the resonator whispering gallery modes (WGMs) which is monitored using a tunable laser coupled to the waveguide. H-2 concentrations below the flammable limit (4%) down to 0.3% could be detected in nitrogen atmosphere at room temperature. For H-2 concentrations between 0.3 and 1%, WGM spectral positions shifted linearly with H-2 concentration at a rate of 32 pm/% H-2. Average response time of the devices was measured to be 50 s for 1% H-2. The proposed device concept can also be used to detect different chemical gases by using appropriate sensing layers. (C) 2015 Elsevier B.V. All rights reserved.", 
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      "pages": "78-83", 
      "title": "SENSORS AND ACTUATORS B-CHEMICAL", 
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