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Design and characterization of a buckling-resistant perforated MEMS membrane under residual stress

Bozyigit, Mustafa Anil; Sahin, Asaf Behzat; Bayram, Baris


BibTeX

@article{bozyigit_mustafa_anil_2020_7729,
  author       = {Bozyigit, Mustafa Anil and
                  Sahin, Asaf Behzat and
                  Bayram, Baris},
  title        = {{Design and characterization of a buckling- 
                   resistant perforated MEMS membrane under residual
                   stress}},
  journal      = {JOURNAL OF MICROMECHANICS AND MICROENGINEERING},
  year         = 2020,
  volume       = 30,
  number       = 5,
  month        = jan,
}
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