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Visible/infrared refractive index and phonon properties of GaN films grown on sapphire by hollow-cathode plasma-assisted atomic layer deposition

Gungor, Nese; Alevli, Mustafa


BibTeX

@article{gungor_nese_2019_67783,
  author       = {Gungor, Nese and
                  Alevli, Mustafa},
  title        = {{Visible/infrared refractive index and phonon 
                   properties of GaN films grown on sapphire by
                   hollow-cathode plasma-assisted atomic layer
                   deposition}},
  journal      = {JOURNAL OF VACUUM SCIENCE \& TECHNOLOGY A},
  year         = 2019,
  volume       = 37,
  number       = 5,
  month        = jan,
}
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Alıntı yap

Gungor, N. ve Alevli, M. (2019). Visible/infrared refractive index and phonon properties of GaN films grown on sapphire by hollow-cathode plasma-assisted atomic layer deposition. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 37(5). doi:10.1116/1.5097467

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