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A Prism-Based Optical Readout Method for MEMS Bimaterial Infrared Sensors

Adiyan, Ulas; Civitci, Fehmi; Ferhanoglu, Onur; Torun, Hamdi; Urey, Hakan


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        "affiliation": "Koc Univ, Elect & Elect Engn Dept, TR-34450 Istanbul, Turkey", 
        "name": "Adiyan, Ulas"
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      {
        "affiliation": "Istanbul Tech Univ, Elect & Commun Engn Dept, TR-34469 Istanbul, Turkey", 
        "name": "Civitci, Fehmi"
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      {
        "affiliation": "Istanbul Tech Univ, Elect & Commun Engn Dept, TR-34469 Istanbul, Turkey", 
        "name": "Ferhanoglu, Onur"
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      {
        "affiliation": "Bogazici Univ, Elect & Elect Engn Dept, TR-34342 Istanbul, Turkey", 
        "name": "Torun, Hamdi"
      }, 
      {
        "affiliation": "Koc Univ, Elect & Elect Engn Dept, TR-34450 Istanbul, Turkey", 
        "name": "Urey, Hakan"
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    "description": "This letter demonstrates a novel prism-based optical-readout, which uses a single prism to detect the incoming TM polarized wave just below the critical angle. The method is used with a 35-mu m-pixel pitch MEMS thermal sensor, whose inclination angle changes with the absorbed infrared (IR) radiation that results in an increase in the reflectivity at the prism's glass-air interface. We compared this approach with the conventional knife-edge method. Noise equivalent temperature difference for a single sensor was measured as 200 mK for knife-edge method, and 154 mK for the proposed critical angle approach. Our approach shows a significant improvement for the sensitivity of the IR sensor. Both methods utilize an AC-coupled readout method for a single MEMS pixel using a photodetector, which responds only to changes in the scene. This method can be scaled to achieve smart pixel cameras for read sensor arrays with low-noise and high-dynamic range.", 
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