1 Ocak 2018 Dergi makalesi Açık Erişim

Goktas, Oktay; Cakiroglu, Dilek; Yildirim, Ozal; Goktas, Nebile Isik

BibTeX

@article{goktas_oktay_2018_36965,
  author       = {Goktas, Oktay and
                  Cakiroglu, Dilek and
                  Yildirim, Ozal and
                  Goktas, Nebile Isik},
  title        = {{Investigation of dose and development time for 
                   thin e-beam resist poly(methyl methacrylate) for
                   large area dense nanopattern applications}},
  journal      = {INTERNATIONAL JOURNAL OF NANOTECHNOLOGY},
  year         = 2018,
  volume       = 15,
  number       = {8-10},
  pages        = {663-668},
  month        = jan,
}