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Spreading Resistance Modeling for Contact Resistivity Extraction in Ohmic Multilayer Structures With Circular Electrodes

Turkay, Deniz; Tsoi, Konstantin; Donercark, Ergi; Turan, Rasit; Yerci, Selcuk


BibTeX

@article{turkay_deniz_2021_236474,
  author       = {Turkay, Deniz and
                  Tsoi, Konstantin and
                  Donercark, Ergi and
                  Turan, Rasit and
                  Yerci, Selcuk},
  title        = {{Spreading Resistance Modeling for Contact 
                   Resistivity Extraction in Ohmic Multilayer
                   Structures With Circular Electrodes}},
  journal      = {IEEE TRANSACTIONS ON ELECTRON DEVICES},
  year         = 2021,
  volume       = 68,
  number       = 12,
  pages        = {6344-6351},
  month        = jan,
}
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