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In-Volume Laser Direct Writing of Silicon-Challenges and Opportunities

Chambonneau, Maxime; Grojo, David; Tokel, Onur; Ilday, Fatih Omer; Tzortzakis, Stelios; Nolte, Stefan


BibTeX

@article{chambonneau_maxime_2021_235274,
  author       = {Chambonneau, Maxime and
                  Grojo, David and
                  Tokel, Onur and
                  Ilday, Fatih Omer and
                  Tzortzakis, Stelios and
                  Nolte, Stefan},
  title        = {{In-Volume Laser Direct Writing of Silicon- 
                   Challenges and Opportunities}},
  journal      = {LASER \& PHOTONICS REVIEWS},
  year         = 2021,
  volume       = 15,
  number       = 11,
  month        = jan,
}
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