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Chambonneau, Maxime; Grojo, David; Tokel, Onur; Ilday, Fatih Omer; Tzortzakis, Stelios; Nolte, Stefan
@article{chambonneau_maxime_2021_235274, author = {Chambonneau, Maxime and Grojo, David and Tokel, Onur and Ilday, Fatih Omer and Tzortzakis, Stelios and Nolte, Stefan}, title = {{In-Volume Laser Direct Writing of Silicon- Challenges and Opportunities}}, journal = {LASER \& PHOTONICS REVIEWS}, year = 2021, volume = 15, number = 11, month = jan, }
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