Remarks concerning about the characteristics of the extractor vacuum gauge and the Quadrupole Mass Spectrometer

In this study, the stability of an extractor gauge (EXG) was investigated through the determination of correction factors (CFs) over a pressure range 5 x 10(-)(5) Pa to 9 x 10(-)(3) Pa by using a Spinning Rotor Gauge (SRG) traceable to UME Static Expansion System, during 20 months and 15 months for N-2 and He, respectively. Percent and fractional changes in CFs were studied and sensitivities of EXG were also presented for Ar and CO2. Direct comparison method was used for EXG stability measurements. Additionally, sensitivity measurements of Quadrupole Mass Spectrometer (QMS) were performed in the range of 1.0 x 10(-6) Pa to 1.0 x 10(-)(2) Pa at emission currents of 2 mA, 0.4 mA and 0.1 mA for He, N-2 and Ar. Long-term stabilities of QMS for N2 and He were analyzed for about 2 years. EXG and SRG were used for QMS sensitivity measurements.