Published January 1, 2010
| Version v1
Journal article
Open
Transformation of germanium to fluogermanates
Creators
- 1. TUBITAK UEKAE, Sci & Tech Res Council Turkey, Natl Inst Elect & Cryptol, TR-41470 Gebze, Kocaeli, Turkey
- 2. Chalmers Univ Technol, Dept Microtechnol & Nanosci, S-41296 Gothenburg, Sweden
- 3. UMICORE, Elect Opt Mat, B-2250 Olen, Belgium
Description
The surface of a single-crystal germanium wafer was transformed to crystals of germanium fluorides and oxides upon exposure to a vapor of HF and HNO3 chemical mixture. Structure analysis indicates that the transformation results in a germanate polycrystalline layer consisting of germanium oxide and ammonium fluogermanate with preferential crystal growth orientation in aOE (c) 101 > direction. Local vibrational mode analysis confirms the presence of N-H and Ge-F vibrational modes in addition to Ge-O stretching modes. Energy dispersive studies reveal the presence of hexagonal alpha-phase GeO2 crystal clusters and ammonium fluogermanates around these clusters in addition to a surface oxide layer. Electronic band structure as probed by ellipsometry has been associated with the germanium oxide crystals and disorder-induced band tailing effects at the interface of the germanate layer and the bulk Ge wafer. The acid vapor exposure causes Ge surface to emit yellow photoluminescence at room temperature.
Files
bib-157e0cb2-b5c9-4cf7-adf1-3578cc5c27ac.txt
Files
(161 Bytes)
| Name | Size | Download all |
|---|---|---|
|
md5:f9092c419a49ef3df60d78f4138b7a0b
|
161 Bytes | Preview Download |