Yayınlanmış 1 Ocak 2012 | Sürüm v1
Dergi makalesi Açık

Thin-Film ZnO Charge-Trapping Memory Cell Grown in a Single ALD Step

  • 1. Masdar Inst Sci & Technol, Abu Dhabi, U Arab Emirates

Açıklama

A thin-film ZnO-based single-transistor memory cell with a gate stack deposited in a single atomic layer deposition step is demonstrated. Thin-film ZnO is used as channel material and charge-trapping layer for the first time. The extracted mobility and subthreshold slope of the thin-film device are 23 cm(2)/V . s and 720 mV/dec, respectively. The memory effect is verified by a 2.35-V hysteresis in the I-drain-V-gate curve. Physics-based TCAD simulations show very good agreement with the experimental results providing insight to the charge-trapping physics.

Dosyalar

bib-84dd1d74-5be1-45a4-9e30-e0ee6534c25b.txt

Dosyalar (194 Bytes)

Ad Boyut Hepisini indir
md5:c197ced969515b75177563cd69776930
194 Bytes Ön İzleme İndir