Piezo LEGS Driving Principle Based on Coordinate Transformation

This paper offers a new approach for specifying the waveforms of driving voltages for a Piezo LEGS motor. A novel idea of coordinate transformation to define the waveforms of driving voltages, based on the motor static model, is presented. This transformation defines driving voltages according to the desired motion of the motor legs in the x- and y-directions. The approach allows a user to first define force acting on the motor rod in the y-direction and define the rod's x-direction trajectory profile. Waveforms of the driving voltages are subsequently defined to meet these requirements. The proposed approach also enables the possibility of defining the desired step shape for the motor and, according to that definition, producing driving voltages. Based on the given coordinate transformation, a simple method for Piezo LEGS motor control, identified as virtual time control, is presented. This method results in overshoot-free high precision positioning.