Yayınlanmış 1 Ocak 2016
| Sürüm v1
Dergi makalesi
Açık
Design and Analysis of A Modular Learning Based Cross-Coupled Control Algorithm for Multi-Axis Precision Positioning Systems
Oluşturanlar
- 1. Bilkent Univ, Dept Mech Engn, TR-06800 Ankara, Turkey
Açıklama
Increasing demand for micro/nano-technology related equipment resulted in growing interest for precision positioning systems. In this paper a modular controller combining cross-coupled control and iterative learning control approaches to improve contour and tracking accuracy at the same time is presented. Instead of using the standard error estimation technique, a computationally efficient and modular contour error estimation technique is used. The new controller is more suitable for tracking arbitrary nonlinear contours and easier to implement to multi-axis systems. Stability and convergence analysis for the proposed controller is presented with the necessary conditions. Effectiveness of the control design is verified with simulations and experiments on a two-axis positioning system. The resulting positioning system achieves nanometer level contouring and tracking performance.
Dosyalar
bib-a71eb4ae-2d5a-4846-8ba3-ec2dfc47506d.txt
Dosyalar
(238 Bytes)
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