Published January 1, 2016
| Version v1
Conference paper
Open
A Novel Characterization Method for MEMS Based Electrostatic Resonators for Q Enhancement and Feedthrough Current Elimination
Creators
- 1. Middle East Tech Univ, Dept Elect & Elect Engn, Ankara, Turkey
- 2. Mikro Biyosistemler Elekt Sanayi & Ticaret AS, Ankara, Turkey
Description
This paper introduces a new technique for electrostatic resonance characterization based on 2nd harmonic distortion terms at the output current. Mathematical analysis of the output current shows that the 2nd harmonic component exhibits higher quality factor (Q) than the 1st harmonic. Besides, output current to feedthrough current ratio is higher in the 2nd harmonic term. Experimental results show that the Q of the resonating system is enhanced by 66% with 2nd harmonic operation. Moreover, the resonance peak has been improved from 0.2 dB to 5dB, showing the effective increase in output current to the feedthrough ratio.
Files
bib-28cac31e-38ca-4fc0-8f0c-9c771b081d36.txt
Files
(208 Bytes)
| Name | Size | Download all |
|---|---|---|
|
md5:f95bdae43a42717f8642586de97f649d
|
208 Bytes | Preview Download |