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Published January 1, 2017 | Version v1
Conference paper Open

Control of Optical Amplification Process with Extremely Low Background Loss in Er:Al2O3 Waveguides

Creators

  • 1. Anadolu Univ, Dept Elect & Elect Engn, TR-26555 Eskisehir, Turkey
  • 2. Anadolu Univ, Dept Mech Engn, TR-26555 Eskisehir, Turkey

Description

We report on record low-loss single mode a-Al2O3 planar waveguides and growth optimization of a-Er2O3 layers to control erbium-doping level of a-Al2O3 layers realized using Atomic Layer Deposition (ALD). Effect of growth cycle ratio of as grown Er2O3/Al2O3 layers on Photoluminescence (PL) is reported.

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