Published January 1, 2017
| Version v1
Journal article
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Single-pulse femtosecond laser fabrication of concave microlens- and micromirror arrays in chalcohalide glass
Creators
- 1. NAS Ukraine, Inst Phys, Prospect Nauky 46, UA-03680 Kiev, Ukraine
- 2. Univ Rennes 1, CNRS, UMR 6226, F-35042 Rennes, France
- 3. NAS Ukraine, Karpenko Phys Mech Inst, Naukova Str 5, UA-79060 Lvov, Ukraine
Description
The diffraction-limited piano-concave microlens- and micromirror arrays were produced in chalcohalide glass of 65GeS(2)-25Ga(2)S(3)-10CsCl composition transparent from similar to 0.5 to 11 mu m. Only a single 200 fs laser pulse with 800 nm central wavelength is required to form microlens, which after metal coating becomes a concave micromirror. This process can serve as a basis for flexible technology to fabricate regular microlens and micromirror arrays for optotelecom applications, its performance being limited only by repetition rate of the laser pulses (typically 1000 microlenses per second). (C) 2017 Elsevier Ltd. All rights reserved.
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