REALIZATION OF TRIBOELECTRIC ENERGY HARVESTERS USING STEEL-POLYMER MICROFABRICATION METHODS

Triboelectric nanogenerators (TENG) are developed for wireless and batteryless keyboard applications, using steel-polymer microfabrication methods including lithography, electrochemical etching, hot embossing and thermo-compression bonding. Microfabricated steel electrode and polymer film (polyethylene naphthalate (PEN)) are used for the first time to implement a TENG of conductor-to-dielectric contact-mode type. Crab leg shaped design is applied on 50 mu m thick steel film to harvest energy. Triboelectric effect between polydimethylsiloxane (PDMS) and steel surfaces is characterized. Maximum instantenous power density of 6 mu W/cm(2) is achieved for 1 mm displacement of 1 Hz motion. Triboelectric surface charge density between steel and PDMS surface is found as 3.2 mu C/m(2).