NiFe plated biaxial magnetostatic MEMS scanner

A two axis Microelectromechanical System (MEMS) micromirror actuator is developed for display and imaging applications. The device operates on the principle of generated magnetostatic torque by a flux generating high-frequency electro coil and a magnetic layer deposited on the movable part. The device can supply full optical scan angles of 88 degrees (at 100 mA drive current) and 1.8 degrees for slow and fast scan directions, respectively. Using a mirror size of 1.5 mm, theta(opt)center dot D products of 132 deg-mm and 2.7 deg-mm for slow and fast axis are achieved, respectively. The scanner can be operated in air due to high mechanical quality factors of the order of 3000.