Published January 1, 2008
| Version v1
Conference paper
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Mechanically Coupled Comb Drive MEMS Stages
Creators
- 1. Koc Univ, Elect Engn & Opt Microsyst Lab, Istanbul, Turkey
- 2. Chalmers, Dept Microtechnol & Nanosci, Gothenburg, Sweden
Description
An electrostatic large clear-aperture in-plane scanner with a novel actuation principle is presented for fast and large stroke scanning applications. 9 pm resonant deflection at 11.51 KHz with 100 Vpp excitation is observed.
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bib-c7343b26-4ef5-44b0-aa6a-f668c2c9c4e9.txt
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