Development of in-flow label-free single molecule sensors using planar solid-state nanopore integrated microfluidic devices

Nanopore biosensors have attracted attention due to their label-free single molecule detection capability. To date, different materials and applications have been shown in the field, varying from Si3N4 to graphene and biomolecule sensing to DNA sequencing. Classical nanopore devices are composed of Si3N4 material supported on a Si wafer and the detection is largely based on electrochemical sensing using chambers of ml volumes on both sides of the nanopore device. In this study, in-flow label-free electrochemical detection of DNA molecules at single molecule level is shown using a classical Si3N4 nanopore device integrated into a microfluidic device. The layout of the device given here set the basics for future works and discussions regarding future microfluidic integrated solid-state nanopores and the behaviour of the molecule under the influence of hydrodynamic flow.