Multiphysics Modeling of a Novel MEMS Accelerometer Based on Electromagnetic Induction

This work reports on the development of a micromachined monolithic single-axis electromagnetic accelerometer based on the relative motion between the windings of a concentric planar transformer, whose internal inductor is suspended. The mechanical and electromagnetic modelling of the sensor is presented, as well as the implementation of a virtual read-out circuit. Electromagnetic simulations were used to extract the electrical performance parameters in the form of a lumped-element model. The results demonstrate that rotation between the two windings leads to an approximately linear variation in the mutual inductance. Furthermore, measurement circuit simulations revealed that the sensor could achieve an in-plane acceleration sensitivity of 32.9 mV/g for a matched network when excited with 3Vpp, 100 MHz excitation voltage.