GAS FLOW SENSING WITH A PIEZORESISTIVE SILICON NANOWIRE-BASED MEMS FORCE SENSOR
Creators
- 1. Koc Univ, Dept Mech Engn, Fac Engn, Istanbul, Turkiye
- 2. Ilmenau Univ Technol, Inst Micro & Nanoelectron, Dept Elect Engn & Informat Technol, Ilmenau, Germany
- 3. Bogazici Univ, Dept Elect & Elect Engn, Fac Engn, Istanbul, Turkiye
- 4. Istanbul Tech Univ, Fac Sci & Letters, Dept Mol Biol & Genet, Istanbul, Turkiye
Description
This paper introduces a novel flow sensor involving suspended piezoresistive silicon nanowires embedded in a MEMS platform. A highly linear response with a sensitivity of 6.26x10(-4) (m/s)(-1) is achieved within the velocity range of about 20 - 40 m/s. This translates to a very high sensitivity per effective sensing area, 7.37 ppm (m/s)(-1) mu m(-2), and 1 nW power consumption, while operating over a velocity range similar to conventional bulky cantilever and diaphragm-based sensors. Further characterization performed at varying distances above the sensor surface demonstrates a spatial sensitivity of 4.90x10(-3) mm(-1). Sensor design enables high-density array operation where each MEMS unit acts as a force measurement pixel to analyze velocity gradients in various microfluidic flows with minimized power consumption and footprint.
Files
bib-f8d0cc79-7675-4b27-9b6b-6435592063f8.txt
Files
(322 Bytes)
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