Published January 1, 2010
| Version v1
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Removal of floating dust in glow discharge using plasma jet
- 1. Natl Inst Lasers Plasma & Radiat Phys, Bucharest 077125, Romania
Description
Dust can be an inconvenient source of impurities in plasma processing reactors and in many cases it can cause damage to the plasma-treated surfaces. A technique for dust expulsion out of the trapping region in plasma is presented here, based on the wind force exerted on dust particles by a pulsed plasma jet. Its applicability is demonstrated by removing floating dust in the sheath of parallel-plate capacitive radio-frequency plasma. (C) 2010 American Institute of Physics. [doi: 10.1063/1.3460293]
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