Construction of a spherically bent crystal analyzer through anodic bonding for a non-resonant inelastic X-ray scattering spectrometer

The anodic bonding method was used to construct spherically bent crystal analyzers for a synchrotron radiation based non-resonant inelastic X-ray scattering spectrometer to probe the local electronic and molecular structure. In order to test the performance of the fabricated analyzers, the O K-edge X-ray Raman scattering spectrum of a lithium-ion battery electrolyte solution was measured and compared to the spectrum in the literature, which was measured by using a conventional X-ray absorption spectroscopy. The X-ray Raman scattering spectrometer based on a 1 m Rowland circle provided to record the data with a resolution of 0.8 eV at similar to 10 keV. The obtained experimental results showed that the anodic bonding was achieved with a high bonding quality.