Published January 1, 2021
| Version v1
Journal article
Open
Structural properties of Ge-Sb-Te alloys
Creators
- 1. TUBITAK BILGEM, Informat & Informat Secur Res Ctr, Kocaeli, Turkey
- 2. Grenoble Alpes Univ, CEA, LETI, F-38000 Grenoble, France
Description
In this work, we have investigated the structural properties of Germanium (Ge)-Antimony (Sb)-Tellurium (Te) (GST) and Ge-rich GST thin film samples. The structural properties of the films are studied after annealing temperatures from room temperature to 450 degrees C. We performed the annealing procedure using a heat rate of 10 degrees C/min to achieve the target temperature for a duration of 10 min under N2 flow. After heat treatment, we carried out X-Ray Diffraction (XRD), Fourier Infra-Red Spectroscopy (FTIR), Raman Spectroscopy and Scanning Electron Microscopy (SEM) equipped with Energy-dispersive X-ray spectroscopy (EDS) to investigate the evolution of the structure in the samples.
Files
bib-a0a34933-2072-433f-abed-423b8e41cc10.txt
Files
(256 Bytes)
| Name | Size | Download all |
|---|---|---|
|
md5:53087af2cfcf09df3a48ddb3a4244d7d
|
256 Bytes | Preview Download |