Published January 1, 2011 | Version v1
Journal article Open

Homogeneous films by inverse pulsed laser deposition

  • 1. Univ Szeged, Dept Opt & Quantum Elect, H-6701 Szeged, Hungary
  • 2. Univ Szeged, Inst Med Phys & Informat, H-6720 Szeged, Hungary

Description

Recently, we proposed an alternative arrangement to traditional on- or off-axis PLD geometries, termed inverse PLD (IPLD) that is capable of producing films of improved surface morphology. Two configurations of this new target-substrate arrangement were developed, namely static and co-rotating IPLD. In the static IPLD configuration, the substrate is stationary with respect to the ablated spot; while in the co-rotating IPLD configuration the substrate is fixed to the target surface and rotates simultaneously with the target, hence offering an appealingly simple approach to homogenize film properties.

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