The effects of surface treatment on optical and vibrational properties of stain-etched silicon

The effects of surface treatment on optical and vibrational properties of porous silicon (por-Si) layers grown on p-type Si wafers by electroless etching technique were studied by FTIR spectroscopy and photoluminescence (PL). The results indicate a correlation between the PL intensity and the strength of the absorption bands induced by multihydride completes (SiHn, n greater than or equal to 2). However, similar correlation was also established for monohydride species as evidenced from the layers containing no multihydrides. Furthermore, a new band is observed at 710 cm(-1) and assigned to multihydrides suggesting a new local bonding environment in these layers.