Published January 1, 2015
| Version v1
Conference paper
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Hydrogen gas sensing using palladium-coated microdisk microresonators
- 1. Koc Univ, Dept Phys, TR-34450 Istanbul, Turkey
- 2. Marmara Univ, Dept Phys, TR-34722 Istanbul, Turkey
- 3. TUBITAK MRC Mat Inst, Sensor Mat Photon Technol Lab, TR-41470 Gebze, Kocaeli, Turkey
- 4. Nigde Univ, Mechatron Engn Dept, TR-51245 Nigde, Turkey
Description
An SU-8 polymer microdisk resonator coated with a palladium (Pd) layer and coupled to a single-mode optical waveguide is used to as a hydrogen (H-2) gas sensor. In the presence of H2 a red shift is observed in the spectral positions of the microdisk whispering gallery modes (WGMs) due to the expansion in the Pd lattice. H-2 concentrations below the flammable limit (4%) down to 0.3% could be detected in nitrogen atmosphere at room temperature. For H-2 concentrations between 0.3 1%, WGM spectral positions shifted linearly with H-2 concentration at a rate of 32 pm/%H-2. Average response time of the devices was measured to be 50 s for 1% H-2. The proposed device concept can also be used to detect different chemical gases by using appropriate sensing layers.
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