Yayınlanmış 1 Ocak 2009
| Sürüm v1
Konferans bildirisi
Açık
MEMS Stage Integrated with Microlens Arrays for High-Resolution Beam Steering
Oluşturanlar
- 1. KOC Univ, Dept Elect Engn, TR-34450 Istanbul, Turkey
- 2. Ecole Polytech Fed Lausanne, Ctr Microfabricat, CH-1015 Lausanne, Switzerland
- 3. Ecole Polytech Fed Lausanne, SAMLAB, Neuchatel, Switzerland
Açıklama
A novel micromechanical stage with a uniaxial set of combfingers capable of 2D actuation is designed and developed. Driven at resonance the stage deflects up to 108 mu m out-of-plane and 102 mu m in-plane, with 140V and 94V peak-to-peak actuation voltage, respectively.
Dosyalar
bib-2fac83e0-118e-4331-8988-0601792f0b84.txt
Dosyalar
(217 Bytes)
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