Published January 1, 2009
| Version v1
Conference paper
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MEMS Stage Integrated with Microlens Arrays for High-Resolution Beam Steering
Creators
- 1. KOC Univ, Dept Elect Engn, TR-34450 Istanbul, Turkey
- 2. Ecole Polytech Fed Lausanne, Ctr Microfabricat, CH-1015 Lausanne, Switzerland
- 3. Ecole Polytech Fed Lausanne, SAMLAB, Neuchatel, Switzerland
Description
A novel micromechanical stage with a uniaxial set of combfingers capable of 2D actuation is designed and developed. Driven at resonance the stage deflects up to 108 mu m out-of-plane and 102 mu m in-plane, with 140V and 94V peak-to-peak actuation voltage, respectively.
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