Yayınlanmış 1 Ocak 2010
| Sürüm v1
Dergi makalesi
Açık
Removal of floating dust in glow discharge using plasma jet
Oluşturanlar
- 1. Natl Inst Lasers Plasma & Radiat Phys, Bucharest 077125, Romania
Açıklama
Dust can be an inconvenient source of impurities in plasma processing reactors and in many cases it can cause damage to the plasma-treated surfaces. A technique for dust expulsion out of the trapping region in plasma is presented here, based on the wind force exerted on dust particles by a pulsed plasma jet. Its applicability is demonstrated by removing floating dust in the sheath of parallel-plate capacitive radio-frequency plasma. (C) 2010 American Institute of Physics. [doi: 10.1063/1.3460293]
Dosyalar
bib-2b5d31da-597e-4a87-95c5-d68da7ecdc0a.txt
Dosyalar
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