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Photonic crystal bandpass filter exploiting the degenerate modes tunable with MEMS actuator for terahertz application

2021    Karakilinc, Ozgur Onder; Tez, Serdar; Kaya, Mehmet

In this study, the bandpass filter characteristics in standing wave resonator formed in a two-dimensional (2D) photonic crystal (PC) is integrated with microelectromechanical systems (MEMS) actuator to tune degenerate mode split. A single and sequentially connected indirect coupling structure consisting of waveguide as well as cavity is placed to the 2D PC. It has been shown that the modes of the bands can be split by structural deformation of the PC via MEMS actuator. The modes frequencies can be changed with the bias voltage applied to MEMS structure, which allows to tune about 1 THz (lambda = 35 nm). The designed PC and MEMS structures are analyzed with simulation programs using finite difference time domain method and finite element method, respectively. The proposed PC structures can be effectively used in new generation all optical THz communication applications.