Zhang, H., Chiappe, D., Meersschaut, J., Conard, T., Franquet, A., Nuytten, T., Mannarino, M., Radu, I., Vandervorst, W. & Delabie, A. (2017) Nucleation and growth mechanisms of Al2O3 atomic layer deposition on synthetic polycrystalline MoS2. JOURNAL OF CHEMICAL PHYSICS , 146(5).