Saleh, H., Bajwa, R., Tekin, I. & Yapici, M. (2020) Wavy Cantilever RF-MEMS Switch based on Bidirectional Control of Intrinsic Stress. 2020 21ST INTERNATIONAL CONFERENCE ON THERMAL, MECHANICAL AND MULTI-PHYSICS SIMULATION AND EXPERIMENTS IN MICROELECTRONICS AND MICROSYSTEMS (EUROSIME).